Residual stress and lattice distortion mapping of patterned devices which failed electromigration testing using the microbeam X-ray diffraction (MXRD) technique
- B.R. York
- H.L. Pfizenmayer
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paper
Publications
24879 results for Exploratory Science
Nanofoam porosity measured by infrared spectroscopy and refractive index
- M.I. Sanchez
- J.L. Hedrick
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperElectromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperDependence of crystallographic texture of C54 TiSi2 on thickness and linewidth in submicron CMOS structures
- V. Svilan
- K.P. Rodbell
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperEffect of contact implants on the patterning of tungsten damascene interconnects
- J.P. Gambino
- M.A. Jaso
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperCopper migration and precipitate dissolution in aluminum/copper lines during electromigration testing
- T.M. Shaw
- C.-K. Hu
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperContinuous processing of sheet-like materials by microwave energy
- D.A. Lewis
- S.J. Whitehair
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperMicroporous crosslinked elastomers
- J.L. Hedrick
- S.A. Srinivasan
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperElectromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperPhase formation in Cu(Sn) alloy thin films
- L. Clevenger
- B. Arcot
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paper