Laser cleaning of surface contaminants
- A.C. Tam
- Hee K. Park
- et al.
- 1997
- CLEO/Pacific Rim 1997
Conference paper
Publications
26911 results for Science
Intermixing and growth kinetics of the first Co monolayers on Cu(001)
- J. Fassbender
- R. Allenspach
- et al.
- 1997
- Surface Science
PaperFertility models for statistical natural language understanding
- Stephen Della Pietra
- Mark Epstein
- et al.
- 1997
- ACL-EACL 1997
Conference paperScalable instruction-level parallelism through tree-instructions
- J.H. Moreno
- Mayan Moudgill
- 1997
- ICS 1997
Conference paperConducting polyaniline coatings for submicron lithography and SEM metrology
- Teresita Graham
- Marie Angelopoulos
- et al.
- 1997
- Microlithography 1997
Conference paperSimulation of X-ray mask defect printability
- B.S. Bollepalli
- Scott D. Hector
- et al.
- 1997
- Microlithography 1997
Conference paperA method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist-KRS
- Karen Petrillo
- James Brancaccio
- et al.
- 1997
- Microlithography 1997
Conference paperEvaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- A.C. Chen
- A. Flamholz
- et al.
- 1997
- Microlithography 1997
Conference paperStability of molded polydime thylsiloxane microstructures
- Emmanuel Delamarche
- Heinz Schmid
- et al.
- 1997
- Advanced Materials
PaperMolecular beam epitaxy and microstructural study of LSC thin films
- K. Verbist
- O. Milat
- et al.
- 1997
- Physical Review B - CMMP
Paper