Using simulation to analyze integrated tool performance in semiconductor manufacturing
- John Mauer
- Roland Schelasin
- 1994
- Microelectronic Engineering
Paper
Publications
26904 results for Science
Role of molecular beam epitaxy in the field of optoelectronics
- Heinz P. Meier
- M. Kamp
- et al.
- 1994
- Microelectronics Journal
PaperInteractive region and volume growing for segmenting volumes in MR and CT images
- G.J. Sivewright
- P. Elliott
- 1994
- Informatics for Health and Social Care
PaperDatalog vs first-order logic
- Miklos Ajtai
- Yuri Gurevich
- 1994
- Journal of Computer and System Sciences
PaperOn the complexity of DNA physical mapping
- Martin Charles Golumbic
- Haim Kaplan
- et al.
- 1994
- Advances in Applied Mathematics
PaperEffects of bias and inert gas on properties of diamond-like carbon deposited by d.c. PACVD
- A. Grill
- V.V. Patel
- 1994
- Diamond and Related Materials
PaperCrystallization of amorphous CoSi2 thin films I. kinetics of nucleation and growth
- J.M. Liang
- L.J. Chen
- et al.
- 1994
- Materials Chemistry and Physics
PaperLow-temperature phase in lixk1-xtao3
- J. Kohanoff
- U.T. Höchli
- 1994
- Ferroelectrics
PaperCharacteristic potentials for mesoscopic rings threaded by an aharonov-bohm flux
- B. Büttiker
- 1994
- Physica Scripta
PaperThermoplastic toughened styrenic thermosets: synthesis, properties and consequences of radical based cure chemistry
- J.L. Hedrick
- J.G. Hilborn
- et al.
- 1994
- Polymer
Paper