Fluorocarbon high density plasma. VI. Reactive ion etching lag model for contact hole silicon dioxide etching in an electron cyclotron resonance plasma
- M. Surendra
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3549 results for Materials Discovery
Micro-impact technique and its applications
- T.W. Wu
- Chih-Kung Lee
- 1994
- Journal of Materials Research
Cross-sectional scanning tunneling microscopy on semiconductor heterostructures
- M. Johnson
- H. Salemink
- 1994
- Materials Science and Engineering B
A novel method for the preparation of magnetic nanoparticles in a polypyrrole powder
- My T. Nguyen
- Arthur F. Diaz
- 1994
- Advanced Materials
Scanning tunneling spectroscopy
- Randall M Feenstra
- 1994
- Surface Science
A Surface Acoustic Wave Sensor Study of Polyimide Thin Film Surface Treatments — Effect on Water Uptake
- D.W. Galipeau
- P.R. Story
- et al.
- 1994
- Journal of Adhesion Science and Technology
Dewetting Dynamics for Large Equilibrium Contact Angels
- Kenneth R. Shull
- Tom E. Karis
- 1994
- Langmuir
Fluorocarbon high-density plasmas. I. Fluorocarbon film deposition and etching using CF4 and CHF3
- G.S. Oehrlein
- Y. Zhang
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Frontiers in computational materials science
- Sokrates T. Pantelides
- 1994
- Computational Materials Science
Simulation of surface topography evolution during plasma etching by the method of characteristics
- Manoj Dalvie
- Satoshi Hamaguchi
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films