Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
24861 results for Exploratory Science
Growth of CoSi2on Si(001): Structure, defects, and resistivity
- R.D. Thompson
- S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA simple bilayer lift-off process
- David F. Witman
- Jane M. Shaw
- et al.
- 1990
- Microelectronic Engineering
PaperPicosecond noninvasive optical detection of internal electrical signals in flip-chip-mounted silicon integrated circuits
- H. Heinrich
- 1990
- IBM J. Res. Dev
PaperMicrostructure of yttria-stabilized zirconia overcoats for thin film recording media
- C. Hwang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOn the validity of vortex-tangle simulations of homogeneous superfluid turbulence
- K.W. Schwarz
- 1990
- Journal of Computational Physics
PaperHole magnetotunneling in p-type AlxGa1-xAs capacitors
- T.W. Hickmott
- 1990
- Solid State Communications
PaperAn ionic model of the crystal chemistry in the superconducting copper oxides of stoichiometry (RE)2CuO4
- Joseph F. Bringley
- Steven S. Trail
- et al.
- 1990
- Journal of Solid State Chemistry
PaperVoltage dependence of the MOSFET gate-to-source/drain overlap
- C.S. Oh
- W.H. Chang
- et al.
- 1990
- Solid State Electronics
PaperOn-chip wiring for VLSI. Status and directions
- M.B. Small
- D.J. Pearson
- 1990
- IBM J. Res. Dev
Paper