Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
25372 results for Science
The electronic properties and control of semiconductor interfaces
- J. Woodall
- P.D. Kirchner
- et al.
- 1990
- Corrosion Science
PaperA low-energy electron diffraction study of the Pd{0 0 1}c(2 × 2)-Mn adsorbed system
- D. Tian
- R.F. Lin
- et al.
- 1990
- Solid State Communications
PaperThe use of simulation in semiconductor technology development
- D.C. Cole
- E.M. Buturla
- et al.
- 1990
- Solid State Electronics
PaperPhysical ageing of stretched specimens of a polycarbonate film and its temperature dependence
- B. Haidar
- T.L. Smith
- 1990
- Polymer
PaperNucleation and cluster size in ultra-thin metal deposits
- H. Poppa
- 1990
- Vacuum
PaperA study of modified polyimide surfaces as related to adhesion
- D-Y. Shih
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInitial stage deposition of Ag on the Si (100)2x1 surface studied by scanning tunneling microscopy
- T. Hashizume
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperReactive ion etching of silicon using bromine containing plasmas
- Tim D. Bestwick
- Gottlieb S. Oehrlein
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperIonomers as charge additives
- A. Diaz
- D. Fenzel-Alexander
- et al.
- 1990
- Journal of polymer science. Part C, Polymer letters
Paper