Contrast and sensitivity trade-offs of resist processing in electron beam lithography at 0.5µm and below
- W. Molzen
- Michael G. Rosenfield
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
24861 results for Exploratory Science
A simple metal pn polymer process using pulsed electron beams in soft vacuum
- J. Krishnaswamy
- Mark Eyolfson
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperAdapting an english morphological analyzer for French
- Roy J. Byrd
- Evelyne Tzoukcrmann
- 1988
- ACL 1988
Conference paperInteraction of ultraviolet laser radiation with corneal tissue
- R. Srinivasan
- 1989
- Proceedings of SPIE 1989
Conference paperCompact blue and green lasers based on nonlinear optical processes
- W. Lenth
- J.-C. Baumert
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper2-Cyclooctylamino-5-nitropyridine, a new nonlinear optical crystal with orthorhombic symmetry
- P. Günter
- Ch. Bosshard
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperPossible evidence for a first-order magnetic phase transition on the Gd(0001) surface
- D. Weller
- S.F. Alvarado
- 1988
- Physical Review B
PaperSynchrotron magnetic x-ray measurements of the order parameter in Mn0.5Zn0.5F2
- T.R. Thurston
- C. Peters
- et al.
- 1988
- Physical Review B
PaperCompactly supported fundamental functions for spline interpolation
- W.A. Dahmen
- T.N.T. Goodman
- et al.
- 1988
- Numerische Mathematik
PaperComputing the bump number with techniques from two-processor scheduling
- Alejandro A. Schäffer
- Barbara B. Simons
- 1988
- Order
Paper