Effect of heat treatments on the electrical resistivity of polycrystalline silicon films implanted with antimony
- Y. Komem
- H.B. Harrison
- 1987
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization
- L. Krusin-Elbaum
- M. Wittmer
- et al.
- 1987
- Applied Physics Letters
PaperStable photoinduced paramagnetic defects in hydrogenated amorphous silicon nitride
- David T. Krick
- P. Lenahan
- et al.
- 1987
- Applied Physics Letters
PaperPhase transformation kinetics - The role of laser power and pulse width in the phase change cycling of Te alloys
- K.A. Rubin
- Roger Barton
- et al.
- 1987
- Applied Physics Letters
PaperOxygen removal from Si via reaction with adsorbed Ge
- J.F. Morar
- B.S. Meyerson
- et al.
- 1987
- Applied Physics Letters
PaperQuantum interference devices made from superconducting oxide thin films
- R.H. Koch
- C.P. Umbach
- et al.
- 1987
- Applied Physics Letters
PaperNonlocal electrical properties in mesoscopic devices
- C.P. Umbach
- P. Santhanam
- et al.
- 1987
- Applied Physics Letters
PaperMicrostructural studies of reactive ion etched silicon
- S.-J. Jeng
- G.S. Oehrlein
- 1987
- Applied Physics Letters
PaperScanning tunneling microscopy and potentiometry on a semiconductor heterojunction
- P. Muralt
- H.P. Meier
- et al.
- 1987
- Applied Physics Letters
PaperEffects of reactive ion etching on chemical vapor deposition
- C.Y. Wong
- P.E. Batson
- 1987
- Applied Physics Letters
Paper