Properties and Microelectronic Applications of Thin Films of Refractory Metal Nitrides
- Marc Wittmer
- 1985
- JVSTA
Paper
Publications
24861 results for Exploratory Science
4f occupation and hybridization from M-shell excitations in Rare-Earth materials
- G. Kaindl
- G. Kalkowski
- et al.
- 1985
- Journal of Magnetism and Magnetic Materials
PaperFormation of TiSi2 and TiN during nitrogen annealing of magnetron sputtered Ti films
- E.D. Adams
- K.Y. Ahn
- et al.
- 1985
- JVSTA
PaperLithographic image simulations
- Douglas S. Goodman
- 1985
- Microelectronic Engineering
PaperCoverage of Si substrates by self-assembling monolayers and multilayers as measured by IR, wettability and X-ray diffraction
- M. Pomerantz
- A. Segmüller
- et al.
- 1985
- Thin Solid Films
PaperThe adsorption and reaction of ethylene on clean and oxygen covered Pd(100)
- E.M. Stuve
- R.J. Madix
- et al.
- 1985
- Surface Science
PaperSummary Abstract: Raman scattering at buried semiconductor-metal interfaces
- J.C. Tsang
- 1985
- JVSTA
PaperAblative photodecomposition of polymers
- R. Srinivasan
- 1985
- JVSTA
PaperSummary Abstract: Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite films
- J. Perrin
- B. Despax
- et al.
- 1985
- JVSTA
PaperScanning tunneling microscopy
- G. Binnig
- H. Rohrer
- 1985
- Surface Science
Paper