Study of silicon contamination and near-surface damage caused by CF 4/H2 reactive ion etching
- G.S. Oehrlein
- R.M. Tromp
- et al.
- 1984
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Detection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopy
- J.M. Jasinski
- E.A. Whittaker
- et al.
- 1984
- Applied Physics Letters
PaperExact description and data fitting of ion-implanted dopant profile evolution during annealing
- R. Ghez
- G.S. Oehrlein
- et al.
- 1984
- Applied Physics Letters
PaperResonant Fowler-Nordheim tunneling in n-GaAs-undoped Al xGa1-xAs-n+GaAs capacitors
- T.W. Hickmott
- P. Solomon
- et al.
- 1984
- Applied Physics Letters
PaperHigh mobility hole gas and valence-band offset in modulation-doped p-AlGaAs/GaAs heterojunctions
- W.I. Wang
- E. Mendez
- et al.
- 1984
- Applied Physics Letters
PaperPhotothermal spectroscopy of weakly absorbing samples using a thermal wave phase shifter
- H. Coufal
- 1984
- Applied Physics Letters
PaperPulsed-laser generation of ultrashort acoustic pulses: Application for thin-film ultrasonic measurements
- A.C. Tam
- 1984
- Applied Physics Letters
PaperTwo-step Al/Ti metallization to PtSi/Si structures
- M. Eizenberg
- K.N. Tu
- et al.
- 1984
- Applied Physics Letters
PaperIon implantation into Nb/Nb oxide/PbAuIn Josephson tunnel junctions
- S.I. Raider
- G.J. Clark
- 1984
- Applied Physics Letters
PaperMicroscopic model for the ablative photodecomposition of polymers by far-ultraviolet radiation (193 nm)
- Barbara J. Garrison
- R. Srinivasan
- 1984
- Applied Physics Letters
Paper