Publications

14460 results for Physical Sciences

Transmission electron microscopy studies on structure and defects in crystalline yttria and lanthanum oxide thin films grown on single crystal sapphire by molecular beam synthesis
- - Masaru Tsuchiya
  - Nestor A. Bojarczuk
  - et al.
- 2010
- Philosophical Magazine
Paper
In situ X-ray diffraction study of thin film Ir/Si solid state reactions
- - W. Knaepen
  - J. Demeulemeester
  - et al.
- 2010
- Microelectronic Engineering
Paper
III-V/Silicon-on-lnsulator nanophotonic cavities for optical network-on-chip
- - Liu Liu
  - Günther Roelkens
  - et al.
- 2010
- Journal of Nanoscience and Nanotechnology
Review
Toward perfect on-wafer pattern placement: Stitched overlay exposure tool characterization
- - Christopher P. Ausschnitt
  - Timothy A. Brunner
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Overlay characterization and matching of immersion photoclusters
- - Blandine Minghetti
  - Timothy Brunner
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
The feasibility of using image parameters for test pattern selection during OPC model calibration
- - Amr Abdo
  - Ramya Viswanathan
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- - David Melville
  - Alan E. Rosenbluth
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Predicting and reducing substrate induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Spacer defined double patterning for sub-72 nm pitch logic technology
- - Ryoung-Han Kim
  - Erin McLellan
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Organocatalysis: Opportunities and challenges for polymer synthesis
- - Matthew K. Kiesewetter
  - Eun Ji Shin
  - et al.
- 2010
- Macromolecules
Review