Publications

24860 results for Exploratory Science

Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Paper
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- - Israel Lerner
  - Jerome M. Eldridge
- 2019
- JES
Paper
On the Nature of Fixed Oxide Charge
- - S.I. Raider
  - A. Berman
- 2019
- JES
Paper
Deposition Techniques and Heat Transfer Properties of Porous Aluminum
- - V.J. Silvestri
  - K.S. Sachar
- 2019
- JES
Paper
High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- - H. Hiraoka
  - J. Pacansky
- 2019
- JES
Paper
RIE Contamination of Etched Silicon Surfaces
- - L.M. Ephrath
  - R.S. Bennett
- 2019
- JES
Paper
Investigation of Laser-Enhanced Electroplating Mechanisms
- - J. Cl. Puippe
  - R.E. Acosta
  - et al.
- 2019
- JES
Paper
Properties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- - V.J. Silvestri
  - C.M. Osburn
  - et al.
- 2019
- JES
Paper
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- - L.M. Ephrarh
  - D.J. Dimaria
  - et al.
- 2019
- JES
Paper
Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- - D.W. Dong
  - E.A. Irene
  - et al.
- 2019
- JES
Paper