The Formation of SiO2 in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
Paper
Publications
24860 results for Exploratory Science
A Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- E. Tierney
- J. Angilello
- 2019
- JES
PaperTitanium Dioxide Films to Improve Photoresist Adhesion
- John C. Marinace
- Ralph C. McGibbon
- 2019
- JES
PaperPlasma Oxide FET Devices
- A. Ray
- A. Reisman
- 2019
- JES
PaperOn the Nature of Fixed Oxide Charge
- S.I. Raider
- A. Berman
- 2019
- JES
PaperEffect of Lubricant Environments on Saw Damage in Si Wafers
- T.S. Kuan
- K.K. Shih
- et al.
- 2019
- JES
PaperSelective Etching of Silicon Dioxide Using Reactive Ion Etching with CF4-H2
- L.M. Ephrath
- 2019
- JES
PaperPreparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- D.W. Dong
- E.A. Irene
- et al.
- 2019
- JES
PaperTiO2 Antireflection Coatings by a Low Temperature Spray Process
- H.J. Hovel
- 2019
- JES
PaperDirect Evidence for 1 nm Pores in “Dry” Thermal SiO2 from High Resolution Transmission Electron Microscopy
- J.M. Gibson
- D.W. Dong
- 2019
- JES
Paper