An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
Paper
Publications
24897 results for Exploratory Science
I. Interaction of Al Films with O2 at Low Pressures
- Jean Grimblot
- Jerome M. Eldridge
- 2019
- JES
PaperAnodic Etching of Defects in P-Type Silicon
- H. Föll
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposition of NiFe
- J. Horkans
- 2019
- JES
PaperOn Fitting Error Functions to Data
- R. Ghez
- M.B. Small
- 2019
- JES
PaperHigh Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
PaperRIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
PaperA Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- E. Tierney
- J. Angilello
- 2019
- JES
PaperProperties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- V.J. Silvestri
- C.M. Osburn
- et al.
- 2019
- JES
PaperSilicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline Silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
Paper