Computational materials science for microelectronics - the old and the new challenges
- Sokrates T. Pantelides
- 1993
- Physica D: Nonlinear Phenomena
Paper
Publications
3608 results for Mathematical Sciences
Photoresist process latitude optimization for synchrotron x-ray lithography
- Andrew T. Pomerene
- David E. Seeger
- et al.
- 1993
- Microlithography 1993
Conference paperProcess latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
Conference paperMixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gates
- Keith T. Kwietniak
- Michael G. Rosenfield
- et al.
- 1993
- Microlithography 1993
Conference paperFully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
- Philip J. Coane
- Kaolin G. Chiong
- et al.
- 1993
- Microlithography 1993
Conference paperGeneration of tunable, fcintosecond-tiinc-scale, vuv pulses by four-wave difference-frequency mixing in xenon
- J.H. Glownia
- D.R. Gnass
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperScanning capacitance detection and charge trapping in NOS
- B.D. Terris
- R.C. Barrett
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperContinuing improvements
- Barry Povey
- 1993
- The TQM Magazine
PaperKnot insertion algorithms for piecewise polynomial spaces determined by connection matrices
- Phillip J. Barry
- Ronald N. Goldman
- et al.
- 1993
- Advances in Computational Mathematics
PaperSplitting a configuration in a simplex
- Kazumiti Numata
- Takeshi Tokuyama
- 1993
- Algorithmica
Paper