Publications

509 results at JES

Analysis of Coincidence Losses for a Monitor of Particle Contamination on Surfaces
- - Douglas W. Cooper
  - Robert J. Miller
- 2019
- JES
Paper
A Study of Luminescent Centers in Reactive-Ion-Etched Silicon
- - T.D. Bestwick
  - G.S. Oehrlein
  - et al.
- 2019
- JES
Paper
Electrical Properties of Chemical-Mechanical Polished Tetraethyl Orthosilicate Films with and Without Capping Layers
- - S. Cohen
  - M.A. Jaso
  - et al.
- 2019
- JES
Paper
low Temperature Silicon Epitaxy by Hot Wall Ultrahigh Vacuum/Low Pressure Chemical Vapor Deposition Techniques: Surface Optimization
- - B.S. Meyerson
  - E. Ganin
  - et al.
- 2019
- JES
Paper
Computer Simulation of Oxygen Segregation in CZ/MCZ Silicon Crystals and Comparison with Experimental Results
- - W.E. Langlois
- 2019
- JES
Paper
Repassivation transients measured with thin film breaking electrodes
- - G.S. Frankel
  - B. Rush
  - et al.
- 2019
- JES
Paper
Vapor Phase Deposition of Palladium for Electroless Copper Plating
- - Richard R. Thomas
  - Jae M. Park
- 2019
- JES
Paper
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- - E. Tierney
- 2019
- JES
Paper
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- - James H. Comfort
  - Rafael Reif
- 2019
- JES
Paper
Maskless Laser Patterning for Gold Plating of Microelectronic Materials
- - R.J. von Gutfeld
  - M.H. Gelchinski
  - et al.
- 2019
- JES
Paper