Etch Selectivity of Silicon Dioxide over Titanium Silicide Using CF4/H2 Reactive Ion Etching
- Steve W. Robey
- Gottlieb S. Oehrlein
- 2019
- JES
Paper
Publications
24897 results for Exploratory Science
Pit Growth in Nife Thin Films
- B.M. Rush
- J. Dukovic
- et al.
- 2019
- JES
PaperThe Microstructure of Transition Metal/Al(Cu) Layers
- H.-C.W. Huang
- M. Wittmer
- et al.
- 2019
- JES
PaperLow Energy X-Ray and Electron Damage to IGFET Gate Insulators
- C.J. Merz
- J.R. Maldonado
- et al.
- 2019
- JES
PaperLaser-Enhanced Electrodeposition of Lead-Tin Solder
- M. Datta
- L.T. Romankiw
- 2019
- JES
PaperThe Effect of Cyanide on the Oxidation of Formaldehyde on Au, Cu, and Pd Electrodes
- Jean Horkans
- 2019
- JES
PaperThermally Developable, Positive Tone, Oxygen RIE Barrier Resist for Bilayer Lithography
- Hiroshi Ito
- Mitsuru Ueda
- et al.
- 2019
- JES
PaperCalculation of Galvanic Currents and Potentials Using a p-Type Finite Element Method
- R.B. Morris
- 2019
- JES
PaperTensor graph neural networks for learning on time varying graphs
- Osman Asif Malik
- Shashanka Ubaru
- et al.
- 2019
- NeurIPS 2019
Workshop paperBenefit Graph Extraction from Healthcare Policies
- Vanessa Lopez
- Valentina Rho
- et al.
- 2019
- ISWC 2019
Conference paper