Radio frequency sputter deposition of si02 films at high rate
- J.S. Logar
- F. Jones
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3555 results for Materials Discovery
Investigation of inas and gasb by high-resolution electron energy-loss spectroscopy
- P.A. Thiry
- J.L. Longueville
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOxygen interaction with pd3sn: X-ray photoelectron spectroscopy and secondary on mass spectrometry
- H.H. Rotermund
- V. Penka
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- M. Liehr
- S. Gates
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: Time-resolved study of oxygen reaction on si(100) surfaces using pulsed molecular beam reactive scattering
- Ming L. Yu
- Benjamin N. Eldridge
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSurface structures for the O/Ni(001) system from c(2x2)0 to saturated nio
- C.R. Brundle
- A. Kaduwela
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: Local bonding and stability of the excited and ionic states of chernisorbed CO and NO
- Ph. Avouris
- P.S. Bagus
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperKinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper