Publications

509 results at JES

Growth of Facet-Free Selective Silicon Epitaxy at Low Temperature and Atmospheric Pressure
- - T.O. Sedgwick
  - P. Agnello
  - et al.
- 2019
- JES
Paper
Initiation of electroless copper plating using Pd+2/poly(acrylic acid) films
- - Robert L. Jackson
- 2019
- JES
Paper
Low Energy Proton Beam Lithography with a Thin Oxygen-Etch Barrier Layer
- - H. Hiraoka
- 2019
- JES
Paper
Plasma Etching of Silicon in SF₆: Experimental and Reactor Modeling Studies
- - Yeong-Jyh Lii
  - Jacob Jorné
  - et al.
- 2019
- JES
Paper
An XPS and TEM Study of Intrinsic Adhesion Between Polyimide and Cr Films
- - N.J. Chou
  - D.W. Dong
  - et al.
- 2019
- JES
Paper
Interaction Between ti and SiO₂
- - C.-Y. Ting
  - M. Wittmer
  - et al.
- 2019
- JES
Paper
Plating of Copper into Through-Holes and Vias
- - Richard C. Alkire
  - Lubomyr T. Romankiw
- 2019
- JES
Paper
Feature-Size Dependence of Etch Rate in Reactive Ion Etching
- - Young H. Lee
  - Zhen H. Zhou
- 2019
- JES
Paper
Short Time Annealing of Coevaporated Tungsten Silicide Films
- - T.O. Sedgwick
  - F.M. d'Heurle
  - et al.
- 2019
- JES
Paper
The electrochemical oxidation and polymerization of polycyclic hydrocarbons
- - Joachim Bargon
  - A. Diaz
- 2019
- JES
Paper