Secondary electron effect on power-voltage relationship in rf sputteringB. BumbleJ.J. Cuomo1985JVSTAPaper
Summary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMSD.J. VitkavageJ.G. Clabeset al.1985JVSTAPaper
Summary Abstract: Energy distributions of electronically excited molecules produced by ion bombardment of siliconR.E. WalkupPh. Avouris1985JVSTAPaper
Summary Abstract: Low temperature adsorption and reaction of O2 with Si(111) 7×7A.J. Schell-SorokinJ.E. Demuth1985JVSTAPaper