Reversal of Relative Oxidation Rates of <111> and <100> Oriented Silicon Substrates at Low Oxygen Partial Pressures
- S.I. Raider
- L.E. Forget
- et al.
- 2019
- JES
Paper
Publications
26917 results for Science
Effects of Ammonia Anneal on Electron Trappings in Silicon Dioxide
- D.W. Dong
- A. Hartstein
- 2019
- JES
PaperSelective Studies of Chemical Vapor-Deposited Aluminum Nitride-Silicon Nitride Mixture Films
- S. Zirinsky
- E.A. Irene
- 2019
- JES
PaperEffects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
PaperThe Formation of SiO2 in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
PaperThe Formation of SiO2 in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
PaperSingle Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast
- T.O. Sedgwick
- R.H. Geiss
- et al.
- 2019
- JES
PaperTiO2 Antireflection Coatings by a Low Temperature Spray Process
- H.J. Hovel
- 2019
- JES
PaperRIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
PaperEffect of CO on the Low Temperature Diffusion of Cr and Si Through Thin Gold Films
- Chin-An Chang
- 2019
- JES
Paper