Publications

26878 results for Science

High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- - H. Hiraoka
  - J. Pacansky
- 2019
- JES
Paper
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- - Israel Lerner
  - Jerome M. Eldridge
- 2019
- JES
Paper
Titanium Dioxide Films to Improve Photoresist Adhesion
- - John C. Marinace
  - Ralph C. McGibbon
- 2019
- JES
Paper
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Paper
Anodic Etching of Defects in P-Type Silicon
- - H. Föll
- 2019
- JES
Paper
On the Role of Buffers and Anions in NiFe Electrodeposition
- - Jean Horkans
- 2019
- JES
Paper
Silicon Oxidation Studies: Measurement of the Diffusion of Oxidant in SiO₂ Films
- - E.A. Irene
- 2019
- JES
Paper
One-Micron Polycide (WSI₂ on Poly-Si) MOSFET Technology
- - M.Y. Tsai
  - H.H. Chao
  - et al.
- 2019
- JES
Paper
Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
- - E.A. Irene
- 2019
- JES
Paper
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- - Hiroyuki Hiraoka
  - Adolfo R. Gutierrez
- 2019
- JES
Paper