II. Oxidation of Al Films
- Jean Grimblot
- Jerome M. Eldridge
- 2019
- JES
Paper
Publications
26917 results for Science
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- R.S. Horwath
- 2019
- JES
PaperA Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- E. Tierney
- J. Angilello
- 2019
- JES
PaperElectrical Properties of Al/Ti Contact Metallurgy for VLSI Application
- C.-Y. Ting
- B.L. Crowder
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposition of NiFe
- J. Horkans
- 2019
- JES
PaperEffect of Plating Parameters on Electrodeposited Nife
- Jean Horkans
- 2019
- JES
PaperElectron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
PaperDeveloper Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- J.M. Shaw
- M. Hatzakis
- 2019
- JES
PaperThe Anodic Sectioning of Beryllium
- M.T. Shehata
- Roger Kelly
- et al.
- 2019
- JES
PaperPredicting Radiation Sensitivity of Polymers
- C.G. Willson
- K. Kinoshita
- 2019
- JES
Paper