Hexachlorodisilane as a Precursor in the LPCVD of Silicon Dioxide and Silicon Oxynitride Films
- R.C. Taylor
- B.A. Scott
- 2019
- JES
Paper
Publications
26878 results for Science
Comparison of the Activity of PdSn Colloidal Catalysts with the Activity of Pure Metals for HCHO Oxidation: Enhancement of the Activity by Ionic Tin
- Jean Horkans
- 2019
- JES
PaperElimination of End-of-Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
- G.A. Rozgonyi
- 2019
- JES
PaperEnergy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon Dioxide
- E. Tierney
- J. Batey
- et al.
- 2019
- JES
PaperProcess Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
PaperPd+2/poly(acrylic acid) thin films as catalysts for electroless copper deposition: Mechanism of catalyst formation
- Robert L. Jackson
- 2019
- JES
PaperSidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
PaperRefinement of Zinc Silicate Phosphor Synthesis
- I.F. Chong
- J.M. Brownlow
- et al.
- 2019
- JES
PaperX-Ray Damage Considerations in MOSFET Devices
- J.R. Maldonado
- S.S. Iyer
- 2019
- JES
PaperElectrolyte Effects on the Switching Reaction of Polyaniline
- Jean-Christophe LaCroix
- A. Diaz
- 2019
- JES
Paper