Publications

26944 results for Science

Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- - J.M. Shaw
  - M. Hatzakis
- 2019
- JES
Paper
A Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- - E. Tierney
  - J. Angilello
- 2019
- JES
Paper
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES
Paper
RIE Contamination of Etched Silicon Surfaces
- - L.M. Ephrath
  - R.S. Bennett
- 2019
- JES
Paper
Oxidation and Corrosion Studies of Fe1-xPdx Films
- - Wen-Yaung Lee
  - G. Scherer
  - et al.
- 2019
- JES
Paper
An Electrochemically Sealed Al₂O₃ Passivation Layer for Aluminum Alloys
- - M.H. Lee
  - A. Homola
- 2019
- JES
Paper
The Etching of Crystallographically Determined Orifices in Sapphire
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
Paper
Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- - Alec N. Broers
- 2019
- JES
Paper
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
Paper
Selective Etching of Silicon Dioxide Using Reactive Ion Etching with CF4-H2
- - L.M. Ephrath
- 2019
- JES
Paper