Alternating phase-shifting mask with reduced aberration sensitivity: Lithography considerations
- Alfred K. Wong
- Lars W. Liebmann
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
14462 results for Physical Sciences
Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
- J.-S. Chun
- J.R.A. Carlsson
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOptimum mask and source patterns to print a given shape
- Alan E. Rosenbluth
- Scott Bukofsky
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperOn reactive diffusion: 1 Kinetics, growth and diffusion, 2 equilibrium?
- F.M. D'Heurle
- P. Gas
- et al.
- 2001
- Defect and Diffusion Forum
PaperThermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage
- Graham L. W. Cross
- Michel Despont
- et al.
- 2001
- Materials Research Society Symposium-Proceedings
PaperCircular dielectric gratings acting as resonators for solid state polymer lasers
- C. Bauer
- H. Giessen
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperGrading interfaces - A new concept to improve device performance in organic multilayer light-emitting diodes
- H. Riel
- S. Barth
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperLayout and language: An efficient algorithm for detecting text blocks based on spatial and linguistic evidence
- Matthew Hurst
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperThe effect of surface preparation on the structure and electrical transport in an organic semiconductor
- Laura L. Kosbar
- Christos D. Dimitrakopoulos
- et al.
- 2001
- Materials Research Society Symposium - Proceedings
PaperBiquadratic exchange coupling in an unequal Fe/Cr/Fe(1 0 0) trilayer
- P. Vavassori
- M. Grimsditch
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
Paper