Characterization of thin and ultrathin polymer and resist films
- Dario L. Goldfarb
- Qinhuang Lin
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
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101 results at Proceedings of SPIE - The International Society for Optical Engineering
Silicon-containing resists for 157 nm applications
- Ratnam Sooriyakumaran
- Debra Fenzel-Alexander
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperCharacterization of new aromatic polymers for 157 nm photoresist applications
- N. Fender
- P.J. Brock
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperAutomated search method for AFM and profilers
- Michael Ray
- Yves C. Martin
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperFeature-shape and line-edge roughness measurement of deep sub-micron lithographic structures using small-angle neutron scattering
- Eric K. Lin
- Wen-li Wu
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperA high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask and device making
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperTunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperCombinatorial device fabrication and optimization of multilayer organic LEDs
- Tilman A. Beierlein
- Hans-Peter Ott
- et al.
- 2001
- Proceedings of SPIE 2001
Conference paperPerformance characterization of a data mining application via hardware-based monitoring
- Mathew Thoennes
- Charles Weems
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperIllusion in reality: Visual perception in displays
- Lloyd Kaufman
- James H. Kaufman
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper