Future of PECVD and spin-on ultra low-k materials
- Willi Volksen
- Theo Frot
- et al.
- 2011
- IITC/MAM 2011
Conference paper
Publications
26880 results for Science
Optimization of porous ultra low- dielectrics (κ≤ 2.55) for 28nm generation
- D. Kioussis
- E.T. Ryan
- et al.
- 2011
- IITC/MAM 2011
Conference paperPost Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- Theo Frot
- Willi Volksen
- et al.
- 2011
- IITC/MAM 2011
Conference paper64 nm pitch Cu dual-damascene interconnects using pitch split double exposure patterning scheme
- Shyng-Tsong Chen
- Hideyuki Tomizawa
- et al.
- 2011
- IITC/MAM 2011
Conference paperCVD Co capping layers for Cu/low-k interconnects: Cu em enhancement vs. Co thickness
- C.-C. Yang
- F. Baumann
- et al.
- 2011
- IITC/MAM 2011
Conference paperSingle-molecule chemistry and physics explored by low-temperature scanning probe microscopy
- Ingmar Swart
- Leo Gross
- et al.
- 2011
- Chemical Communications
PaperBuilding scalable cloud-based communication and collaboration services for SMB enterprises
- Madhusudanan Kandasamy
- Rambilas Varma
- et al.
- 2011
- SRII 2011
Conference paperAnalytics ecosystem transformation: A force for business model innovation
- Ying Chen
- Jeffrey Kreulen
- et al.
- 2011
- SRII 2011
Conference paperAgility of enterprise operations across distributed organizations: A model of cross enterprise collaboration
- Daniel Oppenheim
- Saeed Bagheri
- et al.
- 2011
- SRII 2011
Conference paperRegression testing as a service
- Sheng Huang
- Zhong Jie Li
- et al.
- 2011
- SRII 2011
Conference paper