Ultrasonic and dip resist development processes for 50 nm device fabrication
- K.L. Lee
- J. Bucchignano
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14468 results for Physical Sciences
Will OLED displays challenge liquid crystal displays in notebook computer applications?
- Ronald Troutman
- 1997
- Synthetic Metals
PaperExplanation for the oxide thickness dependence of breakdown characteristics of metal-oxide-semiconductor structures
- D.J. Dimaria
- 1997
- Microelectronic Engineering
PaperProperties of InGaN deposited on glass at low temperature
- Tilman Beierlein
- S. Strite
- et al.
- 1997
- MRS Internet Journal of Nitride Semiconductor Research
PaperMolecular probe techniques for studying diffusion and relaxation in thin and ultrathin polymer films
- David B. Hall
- R.D. Miller
- et al.
- 1997
- Journal of Polymer Science, Part B: Polymer Physics
PaperContact area evolution during an indentation process
- Kangjie Li
- T.W. Wu
- et al.
- 1997
- Journal of Materials Research
PaperMagnetostrictive bending of a cantilevered film-substrate system
- P.M. Marcus
- 1997
- Journal of Magnetism and Magnetic Materials
PaperDissolution kinetics and PAG interaction of phenolic resins in chemically amplified resists
- Hiroshi Ito
- Debra-Fenzel Alexander
- et al.
- 1997
- J. Photopolym. Sci. Tech.
PaperMinimum emission current of liquid metal ion sources
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper"Living" free radical polymerization of macromonomers: Preparation of well defined graft copolymers
- Craig J. Hawker
- David Mecerreyes
- et al.
- 1997
- Macromolecular Chemistry and Physics
Paper