Stressing and high field transport studies on device-grade SiO2 by ballistic electron emission spectroscopy
- R. Ludeke
- H.J. Wen
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14462 results for Physical Sciences
High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- D.M. Tanenbaum
- C.W. Lo
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperGolden interfaces: The surface of self-assembled monolayers
- Emmanuel Delamarche
- Bruno Michel
- et al.
- 1996
- Advanced Materials
PaperMolecular dynamics modeling of microstructure evolution during growth of amorphous carbon films
- J.N. Glosli
- M.R. Philpott
- et al.
- 1996
- Journal of Computer-Aided Materials Design
PaperEffect of a surface layer on the stress relaxation of thin films
- M.D. Thouless
- K.P. Rodbell
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEtching of tantalum in fluorine-containing high density plasmas
- R. Hsiao
- D.C. Miller
- 1996
- JES
Paper193 nm photoresist r&d: the risk & challenge
- Donald C. Hofer
- Robert Allen
- et al.
- 1996
- J. Photopolym. Sci. Tech.
PaperNondestructive analysis of structural defects in wide bandgap II-VI heterostructures
- M.S. Goorsky
- S.E. Lindo
- et al.
- 1996
- Journal of Electronic Materials
PaperElectromigration drift velocity in Al-alloy and Cu-alloy lines
- C.-K. Hu
- K.Y. Lee
- et al.
- 1996
- JES
PaperVoronoi diagrams of polygons: A framework for shape representation
- Niranjan Mayya
- V.T. Rajan
- 1996
- Journal of Mathematical Imaging and Vision
Paper