Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Five different fluorinated polyimides were characterized using X-ray photoelectron spectroscopy (XPS). Elemental compositions and polyimide stoichiometries as elucidated with XPS are reported. The fluorinated polyimides derived from corresponding poly(amic acid)s were completely imidizedafter thermal cure at 350°C, giving rise to a single N 1s peak at 400.8 eV. Interestingly, fluorine segregation on the cured polyimide surface was found to be a function of the polyimide backbone stiffness. © 1996 Taylor & Francis Group, LLC.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
K.N. Tu
Materials Science and Engineering: A