Frank Stem
C R C Critical Reviews in Solid State Sciences
Five different fluorinated polyimides were characterized using X-ray photoelectron spectroscopy (XPS). Elemental compositions and polyimide stoichiometries as elucidated with XPS are reported. The fluorinated polyimides derived from corresponding poly(amic acid)s were completely imidizedafter thermal cure at 350°C, giving rise to a single N 1s peak at 400.8 eV. Interestingly, fluorine segregation on the cured polyimide surface was found to be a function of the polyimide backbone stiffness. © 1996 Taylor & Francis Group, LLC.
Frank Stem
C R C Critical Reviews in Solid State Sciences
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Peter J. Price
Surface Science