Thin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
- S.M. Rossnagel
- C. Nichols
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14466 results for Physical Sciences
Fermi surface and extended van Hove singularity in the non-cuprate layered perovskite superconductor Sr2RuO4
- D.H. Lu
- M. Schmidt
- et al.
- 1996
- Journal of Low Temperature Physics
PaperHigh-temperature polyimide nanofoams for microelectronic applications
- J.L. Hedrick
- K.R. Carter
- et al.
- 1996
- Reactive and Functional Polymers
PaperPredicting in-plane distortion from electron-beam lithography on x-ray mask membranes
- D.L. Laird
- R. Engelstad
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperHigh resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- D.M. Tanenbaum
- C.W. Lo
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperAtomic mechanism for giant magnetoresistance in layered CrFe
- R.K. Nesbet
- 1996
- Journal of Magnetism and Magnetic Materials
PaperStudy of sub-bandgap photo-induced absorption in a-Si:H using excitation spectroscopy in a waveguide configuration
- M. Zelikson
- K. Weiser
- et al.
- 1996
- Journal of Non-Crystalline Solids
PaperA manufacturable poly-emitter graded-SiGe HBT technology for wireless and mixed-signal applications
- D. Nguyen-Ngoc
- D.A. Sunderland
- et al.
- 1996
- Applied Surface Science
PaperOrigin of the φ ∼ ±9° peaks in YBa2Cu3O7-δ films grown on cubic zirconia substrates
- D.G. Schlom
- E.S. Hellman
- et al.
- 1996
- Journal of Materials Research
PaperEpitaxially grown molybdenum thin films deposited by laser ablation on (100) MgO substrates
- M. Guilloux-Viry
- A. Perrin
- et al.
- 1996
- Thin Solid Films
Paper