Progress in 193 nm positive resists
- R.D. Allen
- R. Soortyakumaran
- et al.
- 1996
- J. Photopolym. Sci. Tech.
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Publications
14468 results for Physical Sciences
Polyimide foams derived from a high Tg polyimide with grafted poly(α-methylstyrene)
- J.L. Hedrick
- Richard DiPietro
- et al.
- 1996
- Polymer
PaperElectron-beam microcolumns for lithography and related applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperStudies of mass-movement processes on submarine slopes
- Lincoln F. Pratson
- Homa J. Lee
- et al.
- 1996
- Oceanography
PaperStudy of buried interfaces by soft x-ray fluorescence spectroscopy excited by synchrotron radiation
- D.L. Ederer
- J.A. Carlisle
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperNano-particle transistors and energy-level spectroscopy in metals
- D.C. Ralph
- C.T. Black
- et al.
- 1996
- Superlattices and Microstructures
PaperThin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
- S.M. Rossnagel
- C. Nichols
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperHigh resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- D.M. Tanenbaum
- C.W. Lo
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperRoughening of growing surfaces: Kinetic models and continuum theories
- Albert-László Barabási
- 1996
- Computational Materials Science
PaperHigh-temperature polyimide nanofoams for microelectronic applications
- J.L. Hedrick
- K.R. Carter
- et al.
- 1996
- Reactive and Functional Polymers
Paper