Measurements of acid generation by extreme ultraviolet irradiation in lithographic films
- Martin Glodde
- Dario L. Goldfarb
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
26883 results for Science
Are extreme ultraviolet resists ready for the 32 nm node?
- Karen Petrillo
- Yayi Wei
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperSensitivity analysis on causal events of WIP bubbles by a log-driven simulator
- Ryo Hirade
- Rudy Raymond
- et al.
- 2007
- WSC 2007
Conference paperCreation of sub-20-nm contact using diblock copolymer on a 300 mm wafer for complementary metal oxide semiconductor applications
- Wai-Kin Li
- Sam Yang
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperNanometer-scale control of single quantum dot nucleation through focused ion-beam implantation
- A. Portavoce
- R. Hull
- et al.
- 2007
- Physical Review B - CMMP
PaperBeyond moulin mechanisms
- Aranyak Mehta
- Tim Roughgarden
- et al.
- 2007
- ACM Conference on Electronic Commerce 2007
Conference paperControl of morphology orientation in lithographically patternable diblock copolymers
- Joan K. Bosworth
- Xavier Andre
- et al.
- 2007
- J. Photopolym. Sci. Tech.
PaperTrilayer development for 193 nm immersion lithography
- Sean Burns
- Martin Burkhardt
- et al.
- 2007
- J. Photopolym. Sci. Tech.
PaperUsing molecular principal axes for structural comparison: Determining the tertiary changes of a FAB antibody domain induced by antigenic binding
- B. David Silverman
- 2007
- BMC Structural Biology
PaperA 2.5D hierarchical drawing of directed graphs
- Seok-Hee Hong
- Nikola S. Nikolov
- et al.
- 2007
- Journal of Graph Algorithms and Applications
Paper