Publications

14465 results for Physical Sciences

Computer simulation of boron transport in magnetic czochralski growth of silicon
- - W.E. Langlois
- 2019
- JES
Paper
Reactive Ion Etching of PECVD Amorphous Silicon and Silicon Nitride Thin Films with Fluorocarbon Gases
- - Yue Kuo
- 2019
- JES
Paper
Reactive Ion Etching of PECVD n⁺ a-Si:H: Plasma Damage to PECVD Silicon Nitride Film and Application to Thin Film Transistor Preparation
- - M.S. Crowder
- 2019
- JES
Paper
The Polycrystalline-Si Contact to GaAs
- - P.D. Kirchner
  - J.M. Woodall
  - et al.
- 2019
- JES
Paper
Monitoring the Growth of an Oxide Film on Aluminum In Situ with the Quartz Crystal Microbalance
- - Owen R. Melroy
- 2019
- JES
Paper
Measurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance
- - W.D. Hinsberg
  - C.G. Willson
  - et al.
- 2019
- JES
Paper
Dopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical Simulation
- - K.M. Kim
  - W.E. Langlois
- 2019
- JES
Paper
Phosphorus-Doped Polycrystalline Silicon via LPCVD: II. Surface Interactions of the Silane/Phosphine/Silicon System
- - B.S. Meyerson
  - M.L. Yu
- 2019
- JES
Paper
A Study of the Copper/Cyanide Solution Interphase by Polarization Modulated FT-IR Spectroscopy
- - J.G. Gordon
  - W.G. Golden
  - et al.
- 2019
- JES
Paper
Simulation of Leveling in Electrodeposition
- - John O. Dukovic
  - Charles W. Tobias
- 2019
- JES
Paper