Conducting Transition Metal Oxides: Possibilities for RuO2in VLSI Metallization
- L. Krusin-Elbaum
- M. Wittmer
- 2019
- JES
Publications
14446 results for Physical Sciences
Phosphorus-Doped Polycrystalline Silicon via LPCVD: II. Surface Interactions of the Silane/Phosphine/Silicon System
- B.S. Meyerson
- M.L. Yu
- 2019
- JES
MnFe and NiFe Thin Films and Magnetic Exchange Bilayers
- Michael A. Russak
- S.M. Rossnagel
- et al.
- 2019
- JES
Electroactive Properties of Polyaromatic Molecules
- Joachim Bargon
- A. Diaz
- 2019
- JES
Hexachlorodisilane as a Precursor in the LPCVD of Silicon Dioxide and Silicon Oxynitride Films
- R.C. Taylor
- B.A. Scott
- 2019
- JES
Submicron epitaxial films
- B. Ginsberg
- G.R. Srinivasan
- 2019
- JES
The electrochemical oxidation and polymerization of polycyclic hydrocarbons
- Joachim Bargon
- A. Diaz
- 2019
- JES
Dependence on the NiP Surface Treatment
- Doreen DiMilia
- Jean Horkans
- et al.
- 2019
- JES
Computer simulation of boron transport in magnetic czochralski growth of silicon
- W.E. Langlois
- 2019
- JES
Interaction Between ti and SiO2
- C.-Y. Ting
- M. Wittmer
- et al.
- 2019
- JES