Chemically Amplified Resist Systems
- Hiroshi Ito
- 1991
- Sen'i Gakkaishi
Paper
Publications
14462 results for Physical Sciences
Surface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA note on the linear-parabolic law of phase formation
- S.-L. Zhang
- F.M. D'Heurle
- 1991
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
PaperConductance electron spin resonance of Pd and PdHx particles in zeolite NaY
- F. Blatter
- K.W. Blazey
- 1991
- Journal of Physics and Chemistry of Solids
PaperLithographic performance of an EL-3 system at 0.25μm groundrules
- T. Newman
- M.G.R. Thomson
- et al.
- 1991
- Microelectronic Engineering
Paper16-Term Error Model and Calibration Procedure for On-Wafer Network Analysis Measurements
- Marc Vanden Bossche
- 1991
- IEEE T-MTT
PaperThermal stress-induced and electromigration-induced void-open failures in Al and Al-Cu fine lines
- T. Kwok
- K.K. Chan
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperApplying a simple statistical test to compare two different particle counts
- Douglas W. Cooper
- 1991
- Journal of Aerosol Science
PaperChemical modification of matrix resin networks with engineering thermoplastics: 1. Synthesis, morphology, physical behaviour and toughening mechanisms of poly(arylene ether sulphone) modified epoxy networks
- J.L Hedrick
- I Yilgor
- et al.
- 1991
- Polymer
PaperThe importance of cage versus escape reactivity in the photochemistry of onium salts
- Nigel P. Hacker
- John L. Dektar
- et al.
- 1991
- J. Photopolym. Sci. Tech.
Paper