Determination of proximity effect correction parameters for 0.1 μm electron-beam lithography
- Michael G. Rosenfield
- S.J. Wind
- et al.
- 1990
- Microelectronic Engineering
Paper
Publications
14462 results for Physical Sciences
Study of metallic adhesion using scanning tunneling microscopy
- U Dürig
- O Züger
- 1990
- Vacuum
PaperExperimental and theoretical evidence of image states at semiconductor surfaces: The case of GaP(1 1 0)
- F. Manghi
- P. Perfetti
- et al.
- 1990
- Solid State Communications
PaperHigh resolution electron energy loss spectroscopic characterization of insulators for Si technology
- M. Liehr
- P.A. Thiry
- 1990
- Journal of Electron Spectroscopy and Related Phenomena
PaperA high speed impact actuator using multilayer piezoelectric ceramics
- Shuo Hung Chang
- Han-Chung Wang
- 1990
- Sensors and Actuators, A: Physical
PaperPhotoelectron holography = holography + photoelectron diffraction
- John J. Barton
- 1990
- Journal of Electron Spectroscopy and Related Phenomena
PaperA model for Sb enrichment on creep cavity surfaces
- P. Battaini
- D. D’Angelo
- et al.
- 1990
- Philosophical Magazine Letters
PaperSpecific heat of La2−xSrxCuO4: Volume fraction of superconductivity; Possible structural transition at 45K
- A. Amato
- R.A. Fisher
- et al.
- 1990
- Physica B: Condensed Matter
PaperNucleation controlled phase selection in vanadium/amorphous silicon multilayer thin films
- R.R. de Avillez
- E. Ma
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper