Discrete random dopant distribution effects in nanometer-scale MOSFETs

In this paper, discrete random dopant distribution effects in nanometer-scale MOSFETs were studied using three-dimensional, drift-diffusion "atomistic" simulations. Effects due to the random fluctuation of the number of dopants in the MOSFET channel and the microscopic random distribution of dopant atoms in the MOSFET channel were investigated. Using a simplified model for the threshold voltage fluctuation due to dopant number fluctuation, we examine the standard deviations of the threshold voltage that can be expected for a highly integrated chip. © 1998 Elsevier Science Ltd. All rights reserved.