Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Interdiffusion in PbIn thin film couples has been examined by an X-ray diffraction technique. Initial results indicate that the interdiffusion in such couples is significantly faster than that expected from reported bulk data. © 1975.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films