Ernest Y Wu, Takashi Ando, et al.
IEDM 2023
Efficient active devices for light emission are the major missing piece in the otherwise highly advanced and low-cost silicon photonics platform. III-V semiconductors would be ideally suited for this; especially monolithic integration of the III-V material is challenging but ultimately desirable for scalable integrated circuits. Here we focus on integrated hybrid III-V/Si light emitters achieved using an integration technique called template-assisted selective epitaxy (TASE). This method relies on selective replacement of a prepatterned silicon structure with III-V material and thereby achieves self-aligned and in-plane monolithic integration of III-Vs on silicon. We discuss light emitters based on hybrid III-V/Si photonic crystal structures and highlight the benefits of locally placing the active material with high overlap to the photonic mode. This opens a new path towards realizing fully integrated, densely packed and scalable photonic integrated circuits.
Ernest Y Wu, Takashi Ando, et al.
IEDM 2023
Yichen Xu, Baoqi Zhu, et al.
VLSI Technology and Circuits 2026
Lin Dong, Steven Hung, et al.
VLSI Technology 2021
Akihiro Horibe, Yoichi Taira, et al.
IEDM 2025