Three-dimensional chip stack with integrated decoupling capacitors and thru-si via interconnects

In this letter, the integration of CMOS-compatible thru-Si via (TSV) interconnects with deep-trench decoupling capacitors is demonstrated. Reliability test is performed with a 65-nm CMOS test chip on top of a 3-D Si interposer chip that contains 10000 TSV interconnects. Multilayer stacking is also demonstrated, and capacitance density of 280 nFmm2 is achieved with two-layer Si interposer chip stacks. © 2006 IEEE.