Patterned nanoporous poly(methylsilsesquioxane) thin films: A potential high density substrate
- Zach L. Hogan
- Cortney R. Kreller
- et al.
- 2004
- Materials Science and Engineering C
Paper
Publications
156 results for Willi Volksen
Photopatterned nanoporous media
- Ho-Cheol Kim
- Gregory Wallraff
- et al.
- 2004
- Nano Letters
PaperSupercritical CO2 treatments for semiconductor applications
- S. Gangopadhyay
- J.A. Lubguban
- et al.
- 2004
- MRS Proceedings 2004
Conference paperToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- P. Lazzeri
- G.W. Rubloff
- et al.
- 2004
- Surface and Interface Analysis
PaperAnalysis of an extreme low-κ organosilicate dielectric film exposed to representative plasmas and to a restorative process
- M. Colburn
- S.V. Nitta
- et al.
- 2003
- AMC 2003
Conference paperPore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir
PaperMiscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications: Comparison of modulated differential scanning calorimetry and fluorescence spectroscopy
- Q.R. Huang
- Ho-Cheol Kim
- et al.
- 2003
- Macromolecules
PaperTemplating of silsesquioxane cross-linking using unimolecular self-organizing polymers
- Eric F. Connor
- Linda K. Sundberg
- et al.
- 2003
- Angewandte Chemie - International Edition
PaperSupercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
PaperEffects of templating byproducts on adhesion of nanoporous dielectric films
- D. Maidenberg
- W. Volksen
- et al.
- 2003
- IITC 2003
Conference paper