Strain measured in a silicon-on-insulator, complementary metal-oxide-semiconductor device channel induced by embedded silicon-carbon source/drain regions
- Conal E. Murray
- Z. Ren
- et al.
- 2009
- Applied Physics Letters
Paper
Publications
66 results for I.C. Noyan
Local strain distributions in silicon-on-insulator/stressor-film composites
- Özgür Kalenci
- Conal E. Murray
- et al.
- 2008
- Journal of Applied Physics
PaperSubmicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
- Conal E. Murray
- K.L. Saenger
- et al.
- 2008
- Journal of Applied Physics
PaperReal-space strain mapping of SOI features using microbeam X-ray diffraction
- Conal E. Murray
- S. Polvino
- et al.
- 2008
- Powder Diffraction
PaperSynchrotron microbeam x-ray radiation damage in semiconductor layers
- Sean M. Polvino
- Conal E. Murray
- et al.
- 2008
- Applied Physics Letters
PaperMechanics of microelectronics structures as revealed by X-ray diffraction
- Conal E. Murray
- H. Yan
- et al.
- 2007
- Powder Diffraction
PaperSubmicron mapping of strained silicon-on-insulator features induced by shallow-trench-isolation structures
- Conal E. Murray
- M. Sankarapandian
- et al.
- 2007
- Applied Physics Letters
PaperMapping local strain in thin film/substrate systems using x-ray microdiffraction topography
- Hanfei Yan
- Conal E. Murray
- et al.
- 2007
- Applied Physics Letters
PaperThermal stress evolution in embedded Cu/low-k dielectric composite features
- Conal E. Murray
- Charles C. Goldsmith
- et al.
- 2006
- Applied Physics Letters
PaperHigh-resolution strain mapping in heteroepitaxial thin-film features
- C.E. Murray
- H. Yan
- et al.
- 2005
- Journal of Applied Physics
Paper