Ultrathin high-K gate stacks for advanced CMOS devices
- E. Gusev
- D.A. Buchanan
- et al.
- 2001
- Technical Digest - International Electron Devices Meeting
Paper
Publications
182 results for Eduard Cartier
Hot carrier transport effects in Al2O3-based metal-oxide-semiconductor structures
- R. Ludeke
- M.T. Cuberes
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper80 nm poly-silicon gated n-FETs with ultra-thin Al2O3 gate dielectric for ULSI applications
- D.A. Buchanan
- E. Gusev
- et al.
- 2000
- IEDM 2000
Conference paperAtomic beam deposition of lanthanum- and yttrium-based oxide thin films for gate dielectrics
- S. Guha
- E. Cartier
- et al.
- 2000
- Applied Physics Letters
PaperBreakdown measurements of ultra-thin SiO2 at low voltage
- J.H. Stathis
- A. Vayshenker
- et al.
- 2000
- VLSI Technology 2000
Conference paperLocal transport and trapping issues in Al2O3 gate oxide structures
- R. Ludeke
- M.T. Cuberes
- et al.
- 2000
- Applied Physics Letters
PaperHigh-resolution depth profiling in ultrathin Al2O3 films on Si
- E. Gusev
- M. Copel
- et al.
- 2000
- Applied Physics Letters
PaperDetermination of the energy-dependent conduction band mass in SiO2
- R. Ludeke
- E. Cartier
- et al.
- 1999
- Applied Physics Letters
PaperDefects in thermal oxide studied by photoluminescence spectroscopy
- Hiroyuki Nishikawa
- James H. Stathis
- et al.
- 1999
- Applied Physics Letters
PaperHot electron emission lithography
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microlithography 1999
Conference paper