Applicability of the Fano plot to secondary electron (SE) yield data
- Mihir Parikh
- Ryuichi Shimizu
- 2008
- Applied Physics Letters
Paper
Publications
12 results for Mihir Parikh
Corrections to proximity effects in electron beam lithograhy. III. Experiments
- Mihir Parikh
- 2008
- Journal of Applied Physics
PaperCorrections to proximity effects in electron beam lithography. I. Theory
- Mihir Parikh
- 2008
- Journal of Applied Physics
PaperCorrections to proximity effects in electron beam lithography. II. Implementation
- Mihir Parikh
- 2008
- Journal of Applied Physics
PaperEnergy deposition functions in electron resist films on substrates
- Mihir Parikh
- David F. Kyser
- 2008
- Journal of Applied Physics
PaperEnergetic electron degradation spectra and initial yields in argon
- Mihir Parikh
- 2008
- The Journal of Chemical Physics
PaperCalculation of changes in pattern dimensions to compensate for proximity effects in electron lithography
- Mihir Parikh
- 2008
- Journal of Applied Physics
PaperDependence of pattern dimensions on proximity functions in electron beam lithography
- Mihir Parikh
- 2008
- Journal of Applied Physics
PaperElectron beam damage of chemisorbed surface species: A tunneling spectroscopy study
- James T. Hall
- Paul K. Hansma
- et al.
- 1977
- Surface Science
PaperQuantitative tunneling spectroscopy study of molecular structural changes due to electron irradiation
- Mihir Parikh
- James T. Hall
- et al.
- 1976
- Physical Review A
Paper