Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- Gottlieb S. Oehrlein
- J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
14462 results for Physical Sciences
Multifractal measures and stability islands in the anisotropic Kepler problem
- Martin C. Gutzwiller
- 1989
- Physica D: Nonlinear Phenomena
PaperHigh speed electron beam testing
- George Chiu
- Jean-Marc Halbout
- et al.
- 1989
- Microelectronic Engineering
PaperElectron beam lithography of sub-0.1μm circuits
- S. Rishton
- D. Kern
- et al.
- 1989
- Microelectronic Engineering
PaperSome properties of CrxV1-xSi2 and CrxMo1-xSi2 thin films
- O. Thomas
- Steve Molis
- et al.
- 1989
- Applied Surface Science
PaperGate materials consideration for submicron CMOS
- C.-Y. Ting
- B. Davari
- 1989
- Applied Surface Science
Paper13C chemical shift non‐equivalence in methylene carbons of monosubstituted cyclohexanes
- Hiroshi Ito
- Alfred F. Renaldo
- et al.
- 1989
- Magnetic Resonance in Chemistry
PaperGas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- Ming L. Yu
- Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperStructural properties of high Tc epitaxial Y1Ba2Cu3Ox thin films
- D.C. Bullock
- G. Gorman
- et al.
- 1989
- Physica C: Superconductivity and its applications
PaperEvaluation of aerosol deconvolution algorithms for determining submicron particle size distributions with diffusion battery and condensation nucleus counter
- Jin Jwang Wu
- Douglas W. Cooper
- et al.
- 1989
- Journal of Aerosol Science
Paper