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- Yue Kuo
- 2019
- JES
Paper
Publications
14466 results for Physical Sciences
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
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- JES
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- JES
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- JES
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- 2019
- JES
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- et al.
- 2019
- JES
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- 2019
- JES
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- JES
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