Etch Selectivity of Silicon Dioxide over Titanium Silicide Using CF4/H2 Reactive Ion Etching
- Steve W. Robey
- Gottlieb S. Oehrlein
- 2019
- JES
Paper
Publications
14465 results for Physical Sciences
Grazing Incidence X-Ray and Electrochemical Study of Thin Film Copper(111) on Mica
- Gary L. Barges
- Mahesh G. Samant
- 2019
- JES
PaperProcess Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
PaperLaser-Enhanced Electrodeposition of Lead-Tin Solder
- M. Datta
- L.T. Romankiw
- 2019
- JES
PaperA Study of silicon incorporation in GaAs MOCVD Layers
- E. Veuhoff
- T.F. Kuech
- et al.
- 2019
- JES
PaperCorrelation of Structure and Magnetic Properties of Thin CoP Films
- J. Mahlke
- N.C. Anderson
- et al.
- 2019
- JES
PaperMonitoring the Growth of an Oxide Film on Aluminum In Situ with the Quartz Crystal Microbalance
- Owen R. Melroy
- 2019
- JES
PaperPtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
PaperHeating Effects In Reactive Etching Of Nb And Nb205
- Young H. Lee
- 2019
- JES
PaperSidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
Paper