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Publications
24910 results for Exploratory Science
Probing surface and bulk chemistry in resist films using near edge x-ray absorption fine structure
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- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- Advanced Materials
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