Process integration of self-assembled polymer templates into silicon nanofabrication
- K.W. Guarini
- C.T. Black
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
25371 results for Science
Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy
- P.A. Bennett
- B. Ashcroft
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperTexture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) allow thin films
- A. Gungor
- K. Barmak
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperProbing surface and bulk chemistry in resist films using near edge x-ray absorption fine structure
- Joseph L. Lenhart
- Ronald L. Jones
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperLocalized and directed lateral growth of carbon nanotubes from a porous template
- S.J. Wind
- R. Martel
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperHybrid field-effect transistor based on a low-temperature melt-processed channel layer
- D.B. Mitzi
- C. Dimitrakopoulos
- et al.
- 2002
- Advanced Materials
PaperAttentive billboards: Towards to video based customer behavior understanding
- I. Haritaoglu
- M. Flickner
- 2002
- WACV 2002
Conference paperA selective etching process for chemically inert high-k metal oxides
- Katherine L. Saenger
- Harald F. Okorn-Schmidt
- et al.
- 2002
- MRS Proceedings 2002
Conference paperKinetics of agglomeration of NiSi and NiSi2 phase formation
- C. Detavernier
- A.S. Özcan
- et al.
- 2002
- MRS Proceedings 2002
Conference paperInvestigations of the adhesion of maleic anhydride/cyclic olefin alternating copolymers to silicon substrates: Improved materials for 193 NM lithography
- Anthony J. Pasquale
- Timothy E. Long
- et al.
- 2002
- Journal of Adhesion
Paper