X-ray mask distortion due to radiation damage
- R.E. Acosta
- 1991
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
GaAs opto-electronic integrated circuits for high speed optical communications
- D.L. Rogers
- 1991
- Microelectronic Engineering
PaperFabrication of sub-100nm dual-gate MODFETS with enhanced performance
- K.Y. Lee
- K. Ismail
- et al.
- 1991
- Microelectronic Engineering
PaperLaser photoetching of doped poly(tetrafluoroethylene), substituted-PTFE, and polyimide films
- Hiroyuki Hiraoka
- Sylvain Lazare
- et al.
- 1991
- Microelectronic Engineering
PaperStrain relaxation in GeSi layers with uniform and graded composition
- S.C. Jain
- P. Balk
- et al.
- 1991
- Microelectronic Engineering
PaperLaser cleaning of wafer surfaces and lithography masks
- W. Zapka
- A.C. Tam
- et al.
- 1991
- Microelectronic Engineering
PaperLight scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering
PaperElectron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
PaperA study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- Michael G. Rosenfield
- S. Rishton
- et al.
- 1991
- Microelectronic Engineering
PaperPeriodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- S.J. Wind
- U. Meirav
- et al.
- 1991
- Microelectronic Engineering
Paper