Molecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
26880 results for Science
Liquid-crystalline behaviour of a series of poly(di-n-alkylsilanes)
- P. Weber
- D. Guillon
- et al.
- 1990
- Liquid Crystals
PaperCharacterization of an Optoelectronic Terahertz Beam System
- Martin van Exter
- Daniel R. Grischkowsky
- 1990
- IEEE T-MTT
PaperQuantum Monte Carlo simulations for high-Tc models
- I. Morgenstern
- W. Von Der Linden
- et al.
- 1990
- Physica B: Physics of Condensed Matter
PaperDiamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene
- A. Grill
- B.S. Meyerson
- et al.
- 1990
- IBM J. Res. Dev
PaperSubnanosecond Probing of the Ablation of Soft Plaque from Arterial Wall by 308 nm Laser Pulses Delivered Through a Fiber
- R. Srinivasan
- Kelly G. Casey
- et al.
- 1990
- IEEE JQE
PaperBlock interrupt polysilane derivatives
- R.D. Miller
- G.N. Fickes
- 1990
- Journal of Polymer Science Part A: Polymer Chemistry
PaperAnalysis of Replication in Distributed Database Systems
- Bruno Ciciani
- Daniel M. Dias
- et al.
- 1990
- IEEE TKDE
PaperSilylation of resist materials using di- and polyfunctional organosilicon compounds
- E. Babich
- J. Paraszczak
- et al.
- 1990
- Microelectronic Engineering
PaperApplications of generalized matrix searching to geometric algorithms
- Alok Aggarwal
- Maria Klawe
- 1990
- Discrete Applied Mathematics
Paper