Summary Abstract: Materials and physics issues in scaling bipolar devices
- T.H. Ningtak
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3553 results for Materials Discovery
Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: Properties of hydrocarbon polymer films containing metal clusters
- Christian Laurent
- Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperImaging electronic surface states in real space on the Si(111) 2x1 surface
- Joseph A Stroscio
- R.M. Feenstra
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: The interaction of no with a metal surface: N0/cu(100)
- P.H. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMetal induced crystallization of amorphous silicon
- P.A. Psaras
- L. Hultman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperKinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe problem of edge-atom depression on a Cu{410} surface
- P. Jiang
- F. Jona
- et al.
- 1987
- Surface Science Letters
PaperSummary abstract: The low-temperature reactivity of Si(100) with NH3 and NO: Rate determining steps and rate enhancement via electronic excitations
- F. Bozso
- Ph. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperX-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- N.J. Chou
- J. Paraszczak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper